This setup features a Bruker Vertex 70 spectrometer on the left that is coupled to a Hyperion 1000 microscope. This enables IR spectroscopic investigations on defined spots on the sample surface with dimensions down to 20 µm. These measurements can be conducted in transmission, perpendicular reflexion, gracing-incidence reflexion (83°), and attenuated total reflextion (ATR) geometry. The other side of the IR spectrometer is coupled to a plasma cell, in which atmospheric and low-pressure plasmas can be generated. In this cell, complementary IRRAS, OES, SKP, and QCM measurements can be performed in parallel.