PVD (physical vapour deposition) system
High vacuum coating unit for applying thin layers
The coating chamber of the unit is made of stainless steel and has the dimensions Ø300mm, height 400mm.
The unit offers the options for thermal and/or electron beam evaporation of the film-forming substances. To improve the layer properties, the targets can be heated or cooled. The growth of the layers is recorded in situ by a quartz microbalance.
